David P. Arnold: "Micromagnets for Microsystems - What, Where, Why, & How"

David P. Arnold
Department of Electrical and Computer Engineering, University of Florida

Micromagnets for Microsystems -- What, Where, Why, & How

Magnetically-based transducers are ubiquitous in macroscale systems such as audio speakers, relays, solenoids, and electrical motors. However, implementation at the microscale has been hampered by the lack of high-performance, batch-fabricated permanent (hard) magnets. For example, most microfabricated actuators rely on electrostatic, piezoelectric, thermoelastic, or other transduction mechanisms. This talk will first motivate the development of micromagnetic systems, highlighting advantages and limitations of magnetic approaches. Recent advancements will then be presented for high-performance, process-integrable permanent micromagnets, specifically electroplated CoPt thick-films and polymer-bonded rare-earth powder magnets. Finally, the application of these magnets in microactuators and chip-scale self-assembly will be discussed.