Sie sind hier: FRIAS School of Soft Matter … Fellows Miko Elwenspoek

Miko Elwenspoek

External Senior Fellow
February 2009 - October 2012


Miko Elwenspoek obtained his M.Sc. and PhD in physics from the Free University of Berlin in 1978 and 1983, respectively. There he gained experience in statistical physics, liquid metals, biophysics and nuclear physics. In 1983 he joined Bennema’s group in Nijmegen, The Netherlands, to work on crystal growth. Since 1987 he heads the activity on MEMS at the MESA+ Institute and IMPACT institute at the University of Twente, The Netherlands. He is (co)author of ca. 500 journal and conference papers and co-author of several monographs. He is member of the editorial board of JMM, EDS, Micromechatronics and involved in all international workshops and conferences on MEMS. He likes teaching very much. He founded the bachelor program Advanced Technology, and is currently the director of the Honours Program of the University of Twente. He is fellow of the Academia Vitae, IEEE and of the Institute of Physics.


Publikationen (Auswahl)

    • E.J. Berenschot, N. Burouni,B. Schurink, J.W. van Honschoten, R.G. Sanders, R. Truckenmuller, H.V. Jansen, M.C. Elwenspoek, A.A. van Apeldoorn, N.R. Tas: 3D Nanofabrication of Fluidic Components by Corner Lithography. Small, 2012;
    • M.C. Elwenspoek: Long-Time Data Storage: Relevant Time Scales Challenges, 2, 1 (2011) 19-36:
    • H.T. Hoang, I.M. Segers-Nolten, N.R. Tas NR, J.W. van Honschoten, V. Subramaniam, M.C. Elwenspoek: Analysis of single quantum-dot mobility inside 1D nanochannel devices, Nanotechnology, 22, 7 (2011) 275201-275209
    • J.W. van Honschoten, N.R. Tas, M. Elwenspoek: The profile of a capillary liquid bridge between solid surfaces American Journal of Physics, 78, 3 (2010) 277-286
    • M.C. Elwenspoek, L. Abelmann, E. Berenschot, J. van Honschoten, H. Jansen, N. Tas: Self-assembly of (sub-)micron particles into supermaterials Journal of Micromechanics and Microengineering, 20, 6 (2010) 064001
    • N.R. Tas, M. Escalante, J.W. van Honschoten, H.V. Jansen, M. Elwenspoek: Capillary Negative Pressure Measured by Nanochannel Collapse Langmuir Letter, 26, 10 (2010) 1473-1476
    • W. Koelmans, J. van Honschoten, J. de Vries, P. Vettiger, L. Abelmann, M.C. Elwenspoek: Parallel optical readout of cantilever arrays in dynamic mode. Nanotechnology, 21, 39 (2010) 395503
    • J.W. Berenschot, N.R. Tas, H.V. Jansen, M. Elwenspoek: Chemically anisotropic single-crystalline silicon nanotetrahedra Nanotechnology, 20, 47 (2009) 475302
    • S. Unnikrishnan, H. Jansen, E. Berenschot, B. Mogulkoc, M. Elwenspoek: MEMS within a Swagelok: a new platform for microfluidic devices Lab On A Chip, 9, 13 (2009) 1966-1969
    • S. Unnikrishnan, H. Jansen, F. Falke, N. Tas, H. van Wolferen, M. de Boer, R. Sanders, M. Elwenspoek: Transition flow through an ultra-thin nanosieve Nanotechnology, 20, 30 (2009) 305304
    • Y. Zhao, E. Berenschot, H. Jansen, N. Tas, J. Huskens, M. Elwenspoek: Multi-silicon ridge nanofabrication by repeated edge lithography Nanotechnology, 20, 31 (2009) 315305
    • M. Dijkstra, M.J. de Boer, J.W. Berenschot, T.S.J. Lammerink, R.W. Wiegeink and M.C. Elwenspoek, A versatile surface channel concept for microfluidic applications, J. Micromech. Microeng. 17 (2007) 1971-1977
    • R. M. Tiggelaar, J. W. Berenschot, J. H. de Boer, R. G. P. Sanders, J. G. E. Gardeniers, R. E. Oosterbroek, A. van den Berg and M. C. Elwenspoek, Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes, Lab on Chip 5 (2005) 326-336
    • S. Deladi, N.R. Tas, J.W. Berenschot, G.J.M. Krijnen, M.J. Boer, de, J.H. de Boer, M. Peter, and M.C. Elwenspoek, Micromachined fountain pen for atomic force microscope based nanopatterning, Applied physics letters 85 (2004) 5361
    • N.R. Tas, J. Haneveld, H.V. Jansen, M.C. Elwenspoek, and A. van den Berg, Capilary filling speed of water in nanochannels. Applied physics letters 85 (2004) 3274
    • D. Iannuzzi, S. Deladi, V.J. Gadgil, R.G.P. Sanders, H. Schreuders, and M.C. Elwenspoek, Monolithic fiber-top sensor for critical environments and standard applications, Applied physics letters 88 (2006) 053501-1




    Supermaterials are made of nano- and micro sized building blocks that, under suitable conditions selfassemble into materials with new properties. Currently well-known examples of supermaterials are photonic crystals and meta-materials with negative refractive indices. However, he sees greater challenges and possibilities in using the buildingblocks to mimic biological materials or in building systems from building blocks with internal degrees of freedom.